A 10 V Fully-Integrated Switched-Mode Step-up Piezo Drive Stage in $0.13\,\upmu\text{m} $ CMOS Using Nested-Bootstrapped Switch Cells

A completely integrated 3.3 V to 10 Vpk-pk bidirectional switched-capacitor ladder converter is presented for driving the piezo actuators of a 2 mm wing micro-robotic flying insect. The 0.1-10 MHz converter, fabricated in 1.2 V/3.3 V triple-well 0.13 μm CMOS, operates as a switched-mode amplifier with 0-3.3 V waveforms at the input and a constant 3× step-up while exhibiting symmetric drive strengt...