A 0.4 µg Bias Instability and 1.2 µg Hz Noise Floor MEMS Silicon Oscillating Accelerometer With CMOS Readout Circuit.Xi Wang,Jian Zhao,Yang Zhao,Guo Ming Xia,An Ping Qiu,Yan Su,Yong Ping XuJ. Solid-State Circuits(2017)引用 23|浏览21暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要