A Digitally Controlled Fully Integrated Voltage Regulator With On-Die Solenoid Inductor With Planar Magnetic Core In 14nm Tri-Gate Cmos

A fully integrated digitally controlled two-phase buck voltage regulator (VR) with on-die solenoid inductors with a planar magnetic core is demonstrated in 14-nm tri-gate CMOS for fine-grained power delivery/management domains of high power density in system-on-chips while enabling ultra-thin (z-height) packages. The VR achieves 1-A/mm2 power density for 400-mA load current with a measured peak ef...