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Advances Of The Development Of A Ferroelectric Field-Effect Transistor On Ge(001)

2017 IEEE INTERNATIONAL CONFERENCE ON IC DESIGN AND TECHNOLOGY (ICICDT)(2017)

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摘要
Here we report the recent advances towards the ferroelectric field-effect on Ge(001). We will demonstrate carrier density modulation in the underlying Ge(001) substrate by switching the ferroelectric polarization in the epitaxial c-axis-oriented BaTiO3 on Ge. Recent results of patterning BaTiO3 for device applications and electrical properties of Pt/BTO/Ge heterostructures will be addressed.
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关键词
Non-volatile memory device,ferroelectric field-effect transistor,Germanium,ferroelectricity,BaTiO3
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