An accuracy improvement method for the topology measurement of an atomic force microscope using a 2D wavelet transform.

•Inaccuracy issue caused by nonlinearity of AFM is introduced.•A method for overcoming this problem of low precision while still maintaining good linearity is proposed.•AFM is controlled by optical sensor so that controlled output has the high precision and strain gauge sensor monitor the displacement of PZT actuator.•Proposed method which allows that the AFM measures sub-nanometers sample to few micrometers sample with good linearity and precision.