Microwave Characterization of Ba-Substituted PZT and ZnO Thin Films.

Davide Tierno,Matthijn Dekkers, Paul Wittendorp,Xiao Sun, Samuel C Bayer,Seth T King,Sven Van Elshocht,Marc Heyns,Iuliana P Radu,Christoph Adelmann

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2018）

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摘要

The microwave dielectric properties of (Ba0.1Pb0.9)(Zr0.52Ti0.48)O3 (BPZT) and ZnO thin films with thicknesses below 2 μm were investigated. No significant dielectric relaxation was observed for both BPZT and ZnO up to 30 GHz. The intrinsic dielectric constant of BPZT was as high as 980 at 30 GHz. The absence of strong dielectric dispersion and loss peaks in the studied frequency range can be link...

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关键词

Zinc oxide,II-VI semiconductor materials,Films,Permittivity,Capacitors,Electrodes

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