The Main Lateral Mode Approximation of a Film Bulk Acoustic Resonator with Perfect Metal Electrodes.

Tiberiu Jamneala, Christopher Kirkendall,Brice Ivira,Robert K Thalhammer,Paul Bradley,Richard Ruby

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2018）

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摘要

Using first principles and the constitutive equations of a piezoelectric crystal, we solve the 2-D problem inside a three-layer film bulk acoustic resonator (FBAR) in order to study the dispersion and parasitic lateral modes' characteristic of the structure. In our main lateral mode approximation, described here in detail, we construct the acoustic wave by combining the ideal “piston” mode and the...

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关键词

Film bulk acoustic resonators,Electrodes,Dispersion,Resonant frequency,Boundary conditions,Mathematical model

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