A local optimal method on DSA guiding template assignment with redundant/dummy via insertion

ASP-DAC, pp. 305-310, 2019.

Cited by: 0|Bibtex|Views3|Links
EI

Abstract:

As an emerging manufacture technology, block copolymer directed self-assembly (DSA) is promising for via layer fabrication. Meanwhile, redundant via insertion is considered as an essential step for yield improvement. For better reliability and manufacturability, in this paper, we concurrently consider DSA guiding template assignment with ...More

Code:

Data:

Your rating :
0

 

Tags
Comments