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A local optimal method on DSA guiding template assignment with redundant/dummy via insertion.

ASP-DAC, pp.305-310, (2019)

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Abstract

As an emerging manufacture technology, block copolymer directed self-assembly (DSA) is promising for via layer fabrication. Meanwhile, redundant via insertion is considered as an essential step for yield improvement. For better reliability and manufacturability, in this paper, we concurrently consider DSA guiding template assignment with ...More

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