Single-crystal nanopyramidal BGaN by nanoselective area growth on AlN/Si(111) and GaN templates

NANOTECHNOLOGY, pp. 1156022016.

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Abstract:

We report nano-selective area growth (NSAG) of BGaN by MOCVD on AIN/Si(111) and GaN templates resulting in 150 nm single crystalline nanopyramids. This is in contrast to unmasked or micro-selective area growth, which results in a multi-crystalline structure on both substrates. Various characterization techniques were used to evaluate NSAG...More

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