The chemical composition and band gap of amorphous Si:C:N:H layers

Barbara Swatowska,Stanisława Kluska,Maria Jurzecka-Szymacha,Tomasz Stapinski,Katarzyna Tkacz-Smiech

Applied Surface Science（2016）

引用 9|浏览7

暂无评分

摘要

•Six type of amorphous hydrogenated films were obtained and analysed.•Investigated chemical bondings strongly influenced energy gap values.•Analysed layers could be applied as semiconductors and also as dielectrics.

查看译文

关键词

Amorphous Si:C:N:H layers,PACVD,Optical constants,Band gap,Spectroscopic ellipsometry

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要