Device Characteristics of Single-Gate Vertical Channel (SGVC) 3D NAND Flash Architecture
international memory workshop, pp. 1-4, 2016.
Device characteristics of single-gate vertical channel (SGVC) 3D NAND architecture are discussed in detail. The most important feature of SGVC is that the memory cell is a flat-channel device in 3D, different from the more often used gate-all-around (GAA) macaroni cell. Through various device optimizations, we have successfully produced e...More
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