Synthesis of MAX-Phase Containing Ti-Si-C Films by Sputter-Deposition Using Elemental TargetsTsutomu Sonoda,Setsuo Nakao,M. IkeyamaThe Japan Society of Applied Physics(2013)引用 0|浏览5暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要