Channel-Proximate Silicon-Carbon Source/Drain Stressors for Performance Boost in Strained N-Channel Field-Effect Transistors

S. M. Koh, C. M. Ng, Z. Y. Zhao,H. Maynard, N. Variam,T. Henry,Y. Erokhin,G. Samudra, Y. C. Yeo

The Japan Society of Applied Physics(2009)

引用 0|浏览17
暂无评分
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要