Temperature Coefficient of Threshold Voltage in Metal/High-k Gate Transistors with Various Thickness of TiN and Capping LayersY. Nishida, K. Eikyu,A. Shimizu,T. Yamashita, H. Oda,Y. Inoue,K. ShibaharaThe Japan Society of Applied Physics（2009）引用 0|浏览12暂无评分AI 理解论文溯源树样例生成溯源树，研究论文发展脉络Chat Paper正在生成论文摘要
