Implement Of Low Cost Mems Accelerometers For Vibration Monitoring Of Milling Process

With the trend of developing intelligent machine tools, there are increasing needs of accelerometers for monitoring the vibration. The accelerometers used for measurement of the vibration signals during milling process require the characteristics of high sensitivity, high resolution and high bandwidth. The common used accelerometer is PZT type, however, is too expensive and difficult to integrate into the intelligent modules. Therefore, the MEMS accelerometer is an alternative with the advantages of lower price and better integration. The present study utilized ADXL001 MEMS accelerometer with the bandwidth of 22 kHz and full scale range of 70g to develop a low cost dual-Axis accelerometer for measurement of machine tool vibration. In addition, the platfolin to evaluate the sensitivity of MEMS accelerometer based on ISO-16063-21 back to back calibration method is also developed. Furtheunore, we design the package of the MEMS accelerometer and analyze the influence on the temperature and resonance frequency. Finally, the milling experiment is performed to verify the results of comparison between MEMS accelerometer and PZT accelerometer in the time domain and frequency domain. The results demonstrated that the Dual-Axis MEMS accelerometer is suitable for monitoring the vibration of machine tool with low cost.