Effect of bias voltage on TiAlSiN nanocomposite coatings deposited by HiPIMS

Quansheng Ma,Liuhe Li,Ye Xu,Jiabin Gu,Lei Wang,Yi Xu

Applied Surface Science（2017）

引用 91|浏览7

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摘要

•HiPIMS-deposited TiAlSiN coatings show obvious improvements compared with DCMS.•The effects of bias voltage on coatings properties have evident regularity.•A coating with high hardness, low roughness and small grain size was attained.•An increasing plasma discharge current was detected with increasing the bias voltage.

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关键词

TiAlSiN,HiPIMS,Bias voltage,Microstructure,Mechanical properties

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