Role of pressure in transport of F- ions in BF3 gas for technological applications

In this work we present swarm data obtained for F-ions in molecular gas BF3 necessary to form the global models for the complex collisional plasmas. The new results for scattering cross section set and proposed transport coefficients for F-ions in BF3 that can be used in such models are presented. First we used Nanbu's theory based on thermodynamic threshold energies to calculate cross sections for binary collisions of Fions with BF3 molecules. Cross section for three body association reaction is included by using exothermic cross section for binary reaction normalized at selected pressure. Monte Carlo method is used to obtain swarm parameters at temperature of T= 295 K and pressure of 133.32 Pa (1 Torr).