Control over the optical and electronic performance of GaAs/AlGaAs QWIPs grown by production MBE

K. Roodenko,K. K. Choi, K.P. Clark,E.D. Fraser, K.W. Vargason, J.-M. Kuo,Y.-C. Kao, P.R. Pinsukanjana

Infrared Physics & Technology（2017）

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摘要

•Industrial production of QWIPs on multi-wafer production MBE systems is discussed.•Calibration routines and characterization methods are presented.•Reproducible growth of variety of QWIP structures is demonstrated.

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关键词

QWIP,Infrared,Doping,MBE,Epitaxy,FTIR

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