Optical emission study of ion composition in an inductively coupled oxygen plasma Nathaniel Ly,John B. Boffard,Chun C. Lin,A. E. Wendt,Svetlana Radovanov, Harold Persing,Alexandre LikhanskiiBulletin of the American Physical Society(2014)引用 23|浏览13暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要