Evanescently Coupled Rectangular Microresonators In Silicon-On-Insulator With High Q-Values: Experimental Characterization
PHOTONICS(2017)
摘要
We report on evanescently coupled rectangular microresonators with dimensions up to 20 x 10 mu m(2) in silicon-on-insulator in an add-drop filter configuration. The influence of the geometrical parameters of the device was experimentally characterized and a high Q value of 13,000 was demonstrated as well as the multimode optical resonance characteristics in the drop port. We also show a 95% energy transfer between ports when the device is operated in TM-polarization and determine the full symmetry of the device by using an eight-port configuration, allowing the drop waveguide to be placed on any of its sides, providing a way to filter and route optical signals. We used the FDTD method to analyze the device and e-beam lithography and dry etching techniques for fabrication.
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关键词
rectangular microresonators,silicon-on-insulator,photonic devices
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