High-Performance Carbon Nanotube Complementary Logic With End-Bonded Contacts

Carbon nanotube (CNT) has been envisioned as a promising channel replacement for silicon in sub-5 nm logic technology nodes. Successful implementation of CNT-based CMOS technology requires high-quality lowresistance contacts for both p- and n-type field-effect transistors (PFETs and NFETs) that can be scaled down to sub-10 nm size. End-bonded contact schemes potentially provide the solution for ul...