Supercritical fluid deposition of conformal oxide films: 3-dimentionally-stacked RuO2 /TiO2 /RuO2 structures for MIM capacitors
2017 IEEE Electron Devices Technology and Manufacturing Conference (EDTM)(2017)
摘要
Supercritical fluid deposition (SCFD), which utilizes the oxidation/reduction of organic compounds in supercritical CO
2
(scCO
2
), is a promising thin film process for the fabrication of 3-dimentional (3D) structure due to its conformal deposition capability on high aspect ratio features with moderate growth rate. In this work, SCFD was used to fabricate a conformally-stacked RuO
2
/TiO
2
/RuO
2
structure as an MIM capacitor.
更多查看译文
关键词
supercritical fluid,thin film and MIM capacitor
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络