Infrared photo-resistors based on recrystallized amorphous germanium films on flexible substrates
Sensors and Actuators A: Physical(2017)
摘要
•Development of a fabrication process for near infra-red sensors made from germanium thin films on flexible substrates.•Development of a laser annealing process to convert amorphous films to poly-crystalline ones.•Investigation of the effect of annealing parameters on the morphology of films.•Measurement of the response of the deposited films to near infra-red light.
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关键词
Flexible electronics,Opto-electronics,Photo-resistor,Wearable electronics,Germanium
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