Monolithic Integration of a Micropin-Fin Heat Sink in a 28-nm FPGA

Microfluidic cooling has been demonstrated as an effective means of cooling microelectronic circuits with a very low convective thermal resistance and potential for integration in close proximity to the area of heat generation. However, microfluidic cooling experiments to date have been limited to silicon with resistive heaters representing the heat generating circuitry. In this paper, a micropin-...