Femtosecond Laser Processing of Membranes for Sensor Devices on different Bulk Materials

We demonstrate that diaphragms for sensor applications can be fabricated by laser ablation in a variety of substrates such as ceramics, glass, sapphire or SiC. However, ablation can cause pinholes in membranes made of SiC, Si and metals. Our experiments indicate that pinhole defects in the ablated membranes are affected by ripple structures related to the polarization of the laser. From our simulation results on light propagation in Laser-Induced Periodic Surface Structures (LIPSS) we find out that they are acting as a slot waveguide in SiC material. The results further show that field intensity is enhanced inside LIPSS and spreads out at surface distortions promoting the formation of pinholes. The membrane corner area is most vulnerable for pinhole formation. Pinholes funnel laser radiation into the bulk material causing structural damage and stress in the membrane. We show that a polarization flipping technique inhibits the formation of pin holes caused by LIPSS.