Design, Fabrication, and Characterization of a High Q Silica Nanobeam Cavity With Orthogonal Resonant Modes

We design and fabricate a high $Q$ silica nanobeam cavity that supports both transverse electric (TE) and transverse magnetic modes in the 1.55  $\mathrm{\mu }$m wavelength range. The $Q$ values obtained for both modes exceed $10^4$ and are the highest reported values for photonic crystal (PhC) nanocavities made of silica. We also investigate the optimum conditions for coupling with the cavity in ...