A Hierarchical Manifold Microchannel Heat Sink Array for High-Heat-Flux Two-Phase Cooling of Electronics

International Journal of Heat and Mass Transfer(2018)

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摘要
•A hierarchical manifold microchannel heat sink is fabricated and tested in two-phase operation.•A thin film, serpentine heater provides uniform heating over 5mm×5mm area.•An array of sensors monitors the device temperature field.•Heat sinks with high-aspect-ratio microchannels are etched in silicon for intrachip cooling.•Heat fluxes up to 910W/cm2 are dissipated using the dielectric fluid HFE-7100.
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关键词
High-flux,Boiling,Two-phase,Manifold,Microchannel,Intrachip electronics cooling
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