Structural properties of the formation of zinc-containing nanoparticles obtained by ion implantation in Si (001) and subsequent thermal annealing
Modern Electronic Materials(2017)
摘要
This work deals with the study of structural transformations in the near-surface layers of silicon after ion beam synthesis of zinc-containing nanoparticles. Phase formation after implantation of Zn+ ions and two-stage implantation of O+ and Zn+ ions with subsequent thermal annealing in an atmosphere of dry oxygen has been considered. We heated the substrate to 350°C during the implantation to avoid amorphization. After implantation, the specimens were annealed for 1h in a dry oxygen atmosphere at 800°C. Investigation of the structure of surface silicon layers has been carried out by X-ray diffractometry and transmission electron microscopy.
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关键词
Ion implantation,Zinc-containing nanoparticles,Core-shell nanoparticles,Willemite
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