A New Microfabrication Method for Ion-Trap Chips That Reduces Exposure of Dielectric Surfaces to Trapped Ions
Journal of Microelectromechanical Systems(2018)
摘要
Accumulated electrostatic charges on the dielectric surfaces of ion traps are known to induce stray fields, leading to ion micromotions. In typical microfabricated ion-trap chips, metal electrodes are electrically isolated using thick dielectric pillars, which can accumulate stray charges on their sidewalls. This letter presents a new microfabrication method for ion-trap chips that reduces the exp...
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关键词
Ions,Electrodes,Dielectrics,Surface treatment,Measurement by laser beam,Surface emitting lasers,Metals
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