InAlN/GaN HEMTs on Si with high fT of 250 GHz

IEEE Electron Device Letters(2018)

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摘要
In this letter, InAlN/GaN high electron mobility transistors (HEMTs) with 40-200 nm rectangular gates and 300-700 nm source-to-drain distances were fabricated on Si substrates. The device with 40-nm gate and 300-nm source-to-drain distance exhibited a high drain current of 2.66 A/mm, a transconductance (gm) of 438 mS/mm, and a high current gain cutoff frequency (fT) of 250 GHz. To the best of our ...
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关键词
Logic gates,HEMTs,MODFETs,Silicon,Gallium nitride,Silicon carbide,Substrates
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