Evaluation Of The Distributed Deembedding Methods For 40ghz Cmos Transistor On-Wafer Characterization

In this paper, we evaluate the distributed deembedding methods in comparison with open-short deembedding technique for CMOS transistor on wafer characterization up to 40GHz. A set of NMOS transistor test structures fabricated on HLMC 40nm RF CMOS process are used for the investigation. Experimental results show the distributed methods are more physically reasonable than open-short deembedding technique at millimeter wave frequencies.