Low-cost flexible inorganic optical devices for flexible sensors

In this work, we demonstrate a low-cost method for producing thin inorganic light emitting diodes (LEDs) in a thickness range from 5 to 50 micrometers for optical sensor applications. We observed mechanical flexibility of devices below 10 micrometers. Our approach uses commercially available off-the-shelf components and a mechanical polishing tool to produce flexible inorganic LEDs. We were able to place these devices on conformal substrates, such as thermoplastic polyurethane films. We also demonstrate the thermal stability of produced LEDs.