Mach-Zehnder interferometer with Fabry-Perot cavities in silicon-on-insulator for biosensing

We demonstrate a Fabry-Perot cavity based on Bragg grating mirrors in both arms of a Mach-Zehnder interferometer. The devices were fabricated in silicon-on-insulator and are useful for characterizing the waveguide parameters and obtaining a highly precise and sensitive sensor with a temperature compensating scheme.