Inter-Die Fabrication Uniformity Of Silicon Photonic Fiber-Towaveguide Edge Couplers

Jun Rong Ong,Thomas Y. L. Ang,Tina X. Guo,Ezgi Sahin,Soon Thor Lim,Dawn T. H. Tan,Wang Hong,Ching Eng Png

2018 OPTICAL FIBER COMMUNICATIONS CONFERENCE AND EXPOSITION (OFC)（2018）

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摘要

Silicon-on-insulator fiber-to-waveguide inverse taper edge couplers of different tip widths of 120nm to 200nm are fabricated using a multi-project wafer service. The coupling efficiencies and the inter-die fabrication uniformity of the edge couplers are compared.

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关键词

silicon photonic fiber-to-waveguide edge couplers,silicon-on-insulator fiber-to-waveguide inverse taper edge couplers,multiproject wafer service,inter-die fabrication uniformity,size 120.0 nm to 200.0 nm

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