Ultrathin High- $Q$ 2-D and 3-D RF Inductors in Glass Packages

Embedded inductors in ultrathin glass substrates were modeled, designed, fabricated, and characterized. Various 2-D and 3-D topologies were explored to obtain the tradeoffs in inductance density, quality (Q) factor, size, and self-resonant frequency (SRF). Single-layer spiral inductors were modeled and designed to formulate an inductor library that is optimized for high inductance densities. These...