Kinetic effects of methanol addition on supercritical fluid deposition of TiO 2

Yu Zhao,Kyubong Jung,Yusuke Shimoyama,Yukihiro Shimogaki,Takeshi Momose

The Journal of Supercritical Fluids（2018）

引用 4|浏览1

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摘要

•Highly conformal TiO2 using methanol-assisted supercritical fluid deposition.•A novel analytical scheme using micro/macrocavities and flow/closed reactors.•Two TiO2 deposition paths revealed (surface and consecutive reactions).•Multiple demonstrations using 1D and 2D models.

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关键词

Deposition,Supercritical fluid,TiO2,Methanol,Reaction kinetics

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