Structural development of nanosilver on metal oxide nanofibrous membrane by plasma enhanced chemical vapor deposition (PECVD)

Nakarin Subjalearndee,Dirk Hegemann,Martin Amberg,Barbara Hanselmann,Patrick Rupper,Varol Intasanta

Applied Surface Science（2018）

引用 12|浏览3

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摘要

•PECVD provides noninvasive coating technique to metal-oxide nanomembranes.•Sputtered Ag particles are fully characterized by XRD, TEM and XPS.•The sputtered nanofiber by 6 m/min speed shows excellent photocatalytic activity and antibacterial property.

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关键词

Plasma enhanced chemical vapor deposition,Wet photodeposition,Metal oxide nanofiber,Silver nanoparticle

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