Modeling of Edge Scattering in Graphene Interconnects
IEEE Electron Device Letters(2018)
摘要
Graphene interconnects are being considered as a promising candidate for beyond CMOS applications, thanks to the intrinsic higher carrier mobility, lower aspect ratio and better reliability with respect to conventional Cu damascene interconnects. However, similarly to Cu, line edge roughness can seriously affect graphene resistance, something which must be taken into account when evaluating the re...
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关键词
Graphene,Scattering,Two dimensional displays,Integrated circuit interconnections,Resistance,Correlation,Data models
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