Influence of structure evolution on tribological properties of fluorine-containing diamond-like carbon films: From fullerene-like to amorphous structures
Applied Surface Science(2018)
摘要
•Transition of fullerene-like to amorphous structure is realized by F content variation.•F-FLC film with lowest F content has the best mechanical and tribological properties.•Fullerene-like structures are more essential to their friction than the F element.
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关键词
F-DLC film,Fullerene-like nanostructure,Mechanical properties,Tribological properties
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