Design and fabrication of SU-8 CMUT arrays through grayscale lithography

Sensors and Actuators A: Physical（2018）

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摘要

•SU-8 MEMS transducer fabrication technology without sacrificial layers.•The calibration of the fabrication process for accurate parameter control.•First validation of SU-8 CMUT fabrication without using sacrificial layers.•Validated process robustness, reproducibility, predictability and stability in time.•A generic fabrication technology for a wide range of SU-8 MEMS devices.

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关键词

SU-8 MEMS transducers,Ultrasound transducer,Additive manufacturing,Grayscale lithography

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