CVD Technology for 2-D Materials
IEEE Transactions on Electron Devices(2018)
摘要
The urgently growing demand for lowering the power consumption and increasing the performance in electronic and optoelectronic systems has been driving the scientific community to explore new materials and device architectures. In light of this, 2-D materials including graphene, hexagonal boron nitride, and transition metal dichalcogenides have the potential to revolutionize our semiconductor indu...
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关键词
Graphene,Substrates,Boron,Atomic layer deposition
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