UV Laser annealing of Diamond-Like Carbon layers obtained by Pulsed Laser Deposition for optical and photovoltaic applications

F. Stock,F. Antoni, L. Diebold,C. Chowde Gowda,S. Hajjar-Garreau,D. Aubel,N. Boubiche,F. Le Normand,D. Muller

Applied Surface Science（2019）

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摘要

•Production of a pure carbon-based alternative to indium tin oxide (ITO).•Hydrogen free DLC layers with a high level of sp3 hybridization are obtained by PLD.•UV-laser surface annealing of DLC leads conductive layers.•Transparency and conductivity performances reaches ITO values.

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关键词

Pulsed Laser Deposition (PLD),Diamond-Like Carbon (DLC),Optoelectronic properties,Laser surface annealing

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