Formation of Nitrogen-Containing DLC Film by PVD-CVD Hybrid ProcessYushi Iijima,Takahiro Imai, Ryo Isono,Toru Harigai,Yoshiyuki Suda,Hirofumi Takikawa,Masao Kamiya,Makoto Taki,Yushi Hasegawa,Nobuhiro Tsuji,Satoru Kaneko,Shinsuke Kunitsugu, Sam Yick,Avi Bendavid, Phil J. Martin,Hitoe HabuchiThe Japan Society of Applied Physics(2016)引用 23|浏览2暂无评分关键词Thin Film GrowthAI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要