Focused ultrasound transducer with electrically controllable focal length

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)(2018)

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摘要
This paper reports capable of delivering electrically tunable focal a novel acoustic transducer focused acoustic beam with length over 7 mm Constructed on a 1.02 mm thick lead zirconate titanate (PZT) substrate, the transducer uses a collection of equal-width-equal-spacing concentric ring electrodes (and a circular electrode at the center) on one side of the substrate. With each electrode individually addressable, a desired focal length is mapped to a set of the electrodes generating the acoustic waves that arrive at the focal point in-phase for constructive interference. We have demonstrated a device capable of electrically tuning the focal length (of a focal spot of sub-mm in diameter) from 5 to 12 mm, with the electrical tunability confirmed through droplet ejection from liquid surface (that is at the focal plane), as the liquid level is varied.
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关键词
focused ultrasound transducer,electrically controllable focal length,novel acoustic transducer,focused acoustic beam,electrically tunable focal length,equal-width-equal-spacing concentric ring electrodes,circular electrode,desired focal length,acoustic waves,focal point in-phase,constructive interference,electrical tunability,focal plane
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