CMOS Nanophotonic Sensor with Integrated Readout System
IEEE Sensors Journal(2018)
摘要
The measurement of nanophotonic sensors currently requires the use of external measuring equipment for their read-out such as an optical spectrum analyzer, spectrophotometer, or detectors. This requirement of external laboratory-based measuring equipment creates a “chip-in-a-lab” dilemma and hinders the use of nanophotonic sensors in practical applications. Making nanophotonic sensors usable in ev...
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关键词
Gratings,Sensor systems,Semiconductor device measurement,Optical sensors,Detectors,CMOS technology
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