Sub-Micron Gallium Oxide Radio Frequency Field-Effect Transistors
2018 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)(2018)
摘要
Beta-gallium oxide (BGO) radio frequency device performance is presented using sub-micron T-shaped gates. In the first design, a gate-recess is implemented to allow gate and channel device scaling which results in f
t
/f
max
= 3/13 GHz at VDS= 40 V. The second approach uses a thin and higher doped channel with a T-gate formed by electron beam lithography. An f
t
/f
max
= 5/17 GHz is measured at V
DS
= 15 V and is the highest reported for BGO transistors. Significant gains in RF performance are expected with reduction of device parasitics and vertically scaled epitaxial designs.
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关键词
Gallium Oxide,Radio Frequency,MOSFET,T-gate,gate-recess
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