Toward Microwave S- and X-Parameter Approaches for the Characterization of Ferroelectrics for Applications in FeFETs and NCFETs

Ferroelectric and negative-capacitance field-effect transistors (FeFETs and NCFETs) have recently garnered great attention as devices for applications in memory and low-power logic, respectively. As these technologies are pursued, it is critical to have a variety of measurement approaches, including methods familiar to the electron-device and microwave communities that can aid in fully understanding the behavior of ferroelectrics in FeFETs and NCFETs. In this paper, we propose and show the viability of using frequency-domain electrical measurement techniques employing the well-known microwave S-parameters, and their large-signal generalization and X-parameters. Our methods provide the means to trace the intrinsic polarization versus electric-field curve of the ferroelectric, i.e., with the parasitics de-embedded, thereby showing the innate ferroelectric response, which cannot be done using conventional techniques. These methods also enable extraction of all the parameters of the Landau–Khalatnikov equation, which is commonly used to model ferroelectric behavior in FeFETs and NCFETs. This paper hence takes a useful step toward methods familiar to the electron-device community that can help to better understand and optimize FeFET and NCFET technologies.