Thin-Film Processing Of "Exotic" Phase-Change And Ferroelectric Materials For Iot Applications

K. Suu,I. Kimura, H. Kobayashi, Y. Miyaguchi,T. Masuda,Y. Kokaze,T. Jimbo

2017 CHINA SEMICONDUCTOR TECHNOLOGY INTERNATIONAL CONFERENCE (CSTIC 2017)（2017）

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摘要

We will report our development results of phase-change and ferroelectric thin film processing technologies including sputtering, MOCVD and plasma etching as well as manufacturing processes for PCRAM, FRAM and MEMS/Sensor device applications. Thin-film functional material such as phase-change materials and ferroelectric materials have been utilized to form advanced semiconductor and electronic devices for internet of things (IoT) solutions. We are confident our manufacturing technologies for these materials and devices will contribute to realizing next generation Smart Society.

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关键词

thin-film processing,phase-change materials,ferroelectric materials,IoT applications,sputtering,MOCVD,plasma etching,semiconductor devices,electronic devices,PCRAM,FRAM,MEMS

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