Efficient Suspended Coupler With Loss Less Than −1.4 dB Between Si-Photonic Waveguide and Cleaved Single Mode Fiber

Benefiting from the 193-nm lithography, we have used one of the MPW platforms to realize narrow tip of width 100 nm with great repeatability and uniformity. Based on the new patterning technique, we optimized the suspended spot size converter (SSC) accordingly and the design result showed coupling loss less than -1 dB given with proper matching oil. We fabricated the device together with other pho...