A mode-localized MEMS accelerometer with 7μg bias stability

Milind Pandit,Chun Zhao,Guillermo Sobreviela,Arif Mustafazade,Xudong Zou,Ashwin A. Seshia

international conference on micro electro mechanical systems（2018）

引用 27|浏览17

暂无评分

摘要

This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.

查看译文

关键词

high-stability accelerometers,common mode rejection metrics,closed-loop amplitude ratio measurements,mode-localized MEMS accelerometer,transduction principle,time 30.0 s

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要